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The manufacture of TFT-LCD (thin-film transistor – liquid crystal display) flat panels calls for huge quantities of ultra-pure gases. As demand is spiralling given the dynamic pace of growth in this sector, manufacturers want the reliability and flexibility of a gases partner that can deliver locally but has the backing of a global supply chain. It is also a highly competitive sector, which means that fabs need to keep a tight rein on costs. And as with all sectors of the electronics industry, pressure to minimise or – even better – eliminate greenhouse gases, especially those used in chamber cleaning, is rising.
As a global supplier of the TFT-LCD flat panel industry, we have dedicated process gas production facilities in China and Taiwan and a bulk gas support infrastructure throughout Asia. In addition to the full range of gases required to manufacture TFT-LCD flat panels in all package sizes, we deliver unique value-added technical solutions and turnkey projects to help customers meet their environmental and cost targets. These include fluorine systems to replace nitrogen trifluoride (NF3) in chamber cleaning, which is problematic due to its high global warming potential. Our offering includes:
Large scale on-site SPECTRA-N™ high-purity nitrogen generators
On-site Generation-F® fluorine systems for chamber cleaning.
Building on our position as the leading gas supplier to the Chinese electronics market, we are executing on-site and bulk gas projects for the first two Gen 8 TFT-LCD fabs in China. These turnkey projects include the full gas infrastructure and supply of the actual gases. Benchmark projects such as these demonstrate our commitment to enabling growth in the rapidly expanding TFT-LCD market through best-in-class gas technologies and innovations.